Microsystems
People | Projects
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Shelley Anna Assistant Professor - Mechanical Engineering Professor Anna's research integrates concepts from fluid mechanics, including microfluidics, non-Newtonian rheology, and interfacial phenomena, to target the design and fabrication of advanced materials. sanna@andrew.cmu.edu | 412-268-6492 | 310 SH |
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Nadine Aubry Professor and Head - Mechanical Engineering Professor Aubry's research is in the area of fluid dynamics. She pioneered the modeling of open flow turbulence and other complex flows and systems using advanced decomposition tools and dynamical systems theory. Her current group's research focuses on microscale flows or microfluidics, including micromixers, droplet generators, and manipulators of particles suspended in liquids. aubry@andrew.cmu.edu | 412-268-2501 | 401 SH |
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Shawn Blanton Professor - Electrical and Computer Engineering; Director - CSSI Test and Diagnosis of Digitial Ics, MEMS Built-in Self Test, and ATPG and Fault Simulation Tools. blanton@ece.cmu.edu | 412-268-2987 | A312 HH |
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Robert Davis Bertucci Distinguished Professor - Materials Science and Engineering Robert Davis is the John and Clare Bertucci Distinguished Professor of Materials Science and Engineering at Carnegie Mellon University. He received his Ph.D. in Materials Science and Engineering from the University of California, Berkeley. Professor Davis is a member of the National Academy of Engineering, a Fellow of the American Ceramic Society and a member of the Materials Research Society and TMS. He has won numerous awards including the ALCOA Distinguished Research Award, the ALCOA Award for Research Performance in a Given Year, the Alumni Research Award, the ORNL Excellence in Publications Award, the Richard M. Fulrath Memorial Award from the American Ceramic Society and the R.J.R Reynolds Award as well as the Alexander Holladay Medal for Excellence in Teaching, Research and Outreach. Professor Davis' research interest include wide bandgap electronic materials of SiC, the III-Nitrides and selected oxide materials such as ZnO-based alloys which are technologically important for (1) optoelectronic devices including light-emitting diodes and semiconductor lasers that emit in the green blue and ultra-violet regions of the spectrum for applications in next generation lighting, data storage and optical indicators, (2) microelectronic devices for high-frequency, high-power and high-temperature applications and (3) gas and biological sensors. rfd@andrew.cmu.edu | 412-268-7264 | 237 REH |
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Maarten De Boer Associate Professor - Mechanical Engineering Maarten P. de Boer is interested in thin film materials as related to their physical properties and to their applications. He has used MEMS devices as a vehicle for measuring the mechanical and surface properties of thin films and also for making nanoscale measurements. Researchers in de Boer's group are interested in mechanics, materials science, fabrication, testing and modeling of small-scale devices and properties. mpdebo@andrew.cmu.edu | 412-268-2870 | 325 SH |
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Gary Fedder Director - ICES; Director - CIMM; Howard M. Wilkoff Professor - Electrical and Computer Engineering and Robotics Professor Fedder's research centers on the design and behavioral modeling of microsensors and microactuators and on the fabrication of integrated MEMS with electronic circuits using post-CMOS processing. This approach makes it possible to build complex systems-on-chip for multiple applications including accelerometers, gyroscopes, mirror scanners, probe nanomanipulators, chemical sensor arrays, embedded stress sensors, radio-frequency resonant mixer filters and tunable capacitors. fedder@cmu.edu | 412-268-8443/5352 | 1201 HBH |
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David Greve Professor - Electrical and Computer Engineering dg07@andrew.cmu.edu | 412-268-3707 | 231 REH |
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Steinar Hauan Associate Professor - Chemical Engineering Professor Hauan's research is in the area of computer-aided process design and analysis of complex chemical systems. An important part of the work is to investigate how qualitative insights may be combined with numerical studies in order to arrive at solutions that are more readily understood. hauan@cmu.edu | 412-268-4393 | 3101A DH |
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C. Fred Higgs Assistant Professor - Mechanical Engineering C. Fred Higgs is an Assistant Professor in the Department of Mechanical Engineering at Carnegie Mellon University. He received is Ph.D in mechanical engineering from Rensselaer Polytechnic Institute (RPI) and then completed a post-doctorate at the Georgia Institute of Technology. Professor Higgs conducts particulate flow modeling and experimental research that utilizes the basic principles of tribology, fluid and rheological mechanics. His Particulate Flow & Tribology Laboratory studies three different particulate-based tribosystems from the nano- to macro-scale. Currently, his research projects span the nanotechnology, MEMS, nanomanufacturing, biotechnology, and fossil-fuel energy arenas. In the field known as Tribology- the study of friction, lubrication, and wear- particulate flows have each been studied for their ability to act as lubricants between mating surfaces, or as wear-agents, as is the case with slurries in integrated circuit (IC) and data storage manufacturing. Professor Higgs holds a courtesy appointment in the Electrical & Computer Engineering (ECE) department. higgs@cmu.edu | 412-268-2486 | 309 SH |
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Mohammad Islam Assistant Professor - Chemical Engineering and Materials Science and Engineering Mohammad Islam is an Assistant Professor of Chemical Engineering, Materials Science and Engineering and Physics. The Islam group employs both soft- and nanomaterials approaches to engineer multifunctional materials with tailored optical, electrical, thermal and mechanical properties. These unique materials have diverse applications in areas such as photonics, fuel cells, supercapacitors, drug delivery vessels, scaffolds for tissue engineering, etc. Due to the interdisciplinary nature of the research, the Islam group collaborates closely with researchers from other fields including physics, chemistry and biomedical engineering. Professor Islam obtained a Ph.D from Lehigh University and then did his postdoctoral research at the University of Pennsylvania. mohammad@andrew.cmu.edu | 412-268-8999 | 4315 WEH |
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Philip R. LeDuc Associate Professor - Mechanical Engineering Philip R. LeDuc is an Assistant Professor in the Department of Mechanical Engineering at Carnegie Mellon University with courtesy appointments in Biomedical Engineering and Biological Sciences. Professor LeDuc received his Ph.D. from John Hopkins university and post-doctorate from Children's Hospital / Harvard Medical School. Professor LeDuc's research focuses on linking mechanics to biochemistry through exploring the science of molecular to cellular biomechanics through nano- and micro-technology, control theory approaches, and computational biology. Professor LeDuc investigates the link between mechanics and biochemistry with respect to structural regulation in living cells. Specifically, he is interested in the question of how cells sense and respond to mechanical signals and convert them into biochemical processes. His most recent work as been featured in Nature and can viewed through following link: (http://www.nature.com/nnano/journal/v2/n1/index.html#cy). prleduc@cmu.edu | 412-268-2504 | 415 SH |
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Yi Luo Assistant Professor - Electrical and Computer Engineering Yi Luo is an Assistant Professor in the Department of Electrical and Computer Engineering at Carnegie Mellon University. Professor Luo received his Ph.D from Columbia University. Professor Luo's research interest involves studying physical properties and applications of novel nanoscale systems. Professor Luo's research activities involve design, fabrication, and characterization of these systems. Currently, a special focus is in the area of nanoscale molecular electronics. The idea is to use specially designed molecules and other nano-components to build electronic systems for logic and memory applications. Professor Luo's research can be found at the following link: http://www.ece.cmu.edu/directory/details/155. yl827@andrew.cmu.edu | 412-268-5401 | 249 REH |
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Tamal Mukherjee Professor - Electrical and Computer Engineering Design Automation for Micro-electromechanical Systems (MEMS), Design Automation for Microfluidics-based BioChips, and MEMS-enhanced Reconfigurable RF Circuits. tamal@ece.cmu.edu | 412-268-8522 | 332 REH |
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Burak Ozdoganlar Assistant Professor - Mechanical Engineering Burak Ozdoganlar is an Assistant Professor in the Department of Mechanical Engineering at Carnegie Mellon University. Professor Ozdoganlar received his Ph.D from University of Michigan and did a Post-doctorate at the University of Illinois at Urbana - Champaign. Before joining Carnegie Mellon University, he worked at Sandia National Laboratories, NM as a senior member of technical staff. Professor Ozdoganlar's research interest focuses on nano/micro/meso-scale manufacturing; nano and micro-scale mechanical characterization; and modeling, simulation and experimentation of MEMS/microsystems. burakoz@andrew.cmu.edu | 412-268-9890 | 303 SH |
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Todd Przybycien Professor and Head - Biomedical Engineering Professor Przybycien's research interests include Cellular and Molecular Biotechnology: protein adsorption and aggregation phenomena in bioprocessing environments, protein structure characterization, PEGylated protein delivery, MEMS-based biosensors. todd@andrew.cmu.edu | 412-268-3857 | 2100 DH |
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David Ricketts Assistant Professor - Electrical and Computer Engineering Nanoscale electronics, nanoscale devices, nonlinear dynamics, analog circuits ricketts@ece.cmu.edu | 412-268-3847 | 331 REH |
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Metin Sitti Associate Professor - Mechanical Engineering sitti@cmu.edu | 412-268-3632 | 315 SH |
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Shi-Chune Yao Professor - Mechanical Engineering Professor Yao's research interests are mainly at multiphase flow, heat transfer and combustion. This is closely related to energy and manufacturing industries. He works on both experimental and theoretical researches on subjects which are important to industries but are fundamental in nature. scyao@cmu.edu | 412-268-2508 | |
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Stefan Zappe Assistant Professor - Biomedical Engineering Stefan's primary research interest is in the area of micro- and nanofabricated systems for biological applications. zappe@cmu.edu | 412-736-1683 | |
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Micro Electro-Mechanical Systems (MEMS) Lab